MOUDI Micro-Orifice Uniform Deposit Impactor

• Precision size classification of aerosols
• 4 Equal Geometrical Intervals per Decade of Particle Size
• Models 100 and 110
  • 30 L/min Sampling Flow Rate
  • 8 and 10 Impactor Stages + after Filter
  • 0.18 mm and 0.056 mm Minimum Cut-Point
• Model 115
  • 10 L/min Sampling Flow Rate
  • 3 Impactor Stages + after Filter
  • 10 mm Minimum Cut-Point

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Model 1000XP WPS

• Wide-Range Particle Spectrometer
• Measures Particles from 10nm to 10,000nm
• 3.3 L/min Sampling Flow Rate
• Receipe Controlled

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Model 2110 Cleanroom Cascade Impactor

• 6 Stage Cascade Impactor
• Collects Particles by Impactor from 0.05 mm - 10 mm
• 3 L/min Sampling Flow Rate
• For Single Particle Analysis by SEM, AFM, EDX, Auger, SIMS, and other Analytical Techniques

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Model 2300XP PSL and Process Particle Wafer Deposition System

• Calibrate Wafer Scanners
• Evaluate Efficiency of Wet Cleaning Stations
• Deposit PSL Spheres and Process Particles down to 0.04 mm (Si, SiO₂, Si₃N₄, TiO₂, W, etc.)
• Computerized Recipe Control
• Up to 300mm Diameter

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