We suggest that static control programs become more effective and less
complex if we focus on just four basic principles of static control as follows:
Personnel and Moving Equipment
In many facilities, people are one of the prime generators of static
electricity. The simple act of walking around or repairing a board can generate several
thousand volts on the human body. If not properly controlled, this static charge can
easily discharge into a static-sensitive device—a human body model (HBM) discharge.
Even in highly automated assembly and test processes, people still
handle static-sensitive devices ... in the warehouse, in repair, in the lab, in transport.
For this reason, static control programs place considerable emphasis on controlling
personnel-generated electrostatic discharge. Similarly, the movement of carts and other
wheeled equipment through the facility can also generate static charges that can transfer
to the products being transported on this equipment.
Wrist Straps
Typically, the primary means of controlling static charge on personnel
is with a wrist strap. When properly worn and connected to ground, a wrist strap keeps the
person wearing it near ground potential. Because the person and other grounded objects in
the work area are at or near the same potential, there can be no hazardous discharge
between them. In addition, static charges are safely dissipated from the person to ground
and do not accumulate.
Wrist straps have two major components, the cuff that goes around the
person's wrist and the ground cord that connects the cuff to the common point ground. Most
wrist straps have a current-limiting resistor molded into the ground cord head on the end
that connects to the cuff. The resistor most commonly used is a one megohm, 1/4 watt with
a working voltage rating of 250 V.
Wrist straps should be tested on a regular basis. Daily testing or
continuous monitoring is recommended.
Floors, Floor Mats, Floor Finishes
A second method of controlling electrostatic charge on personnel is
with the use of ESD-protective floors in conjunction with ESD-control footwear or foot
straps. The combination of floor materials and footwear provides a ground path for the
dissipation of electrostatic charge, thus reducing the charge accumulation on personnel
and other objects to safe levels. In addition to dissipating charge, some floor materials
(and floor finishes) also reduce triboelectric charging. The use of floor materials is
especially appropriate in those areas where increased personnel mobility is necessary. In
addition, floor materials can minimize charge accumulation on chairs, carts, walking
stackers, lift trucks, and other objects that move across the floor. However, those items
require dissipative or conductive casters or wheels to make electrical contact with the
floor.
Shoes, Grounders, Casters
Used in combination with ESD-protective floor materials, static control
shoes, grounders, casters, and wheels provide the necessary electrical contact between the
person or object and the floor material. Insulative footwear, casters, or wheels prevent
static charges from flowing from the body to the floor to ground.
Clothing
Clothing is a consideration in some ESD-protective areas, especially in
cleanrooms and very dry environments. Clothing materials can generate electrostatic
charges when they contact and separate from other objects and the clothing itself. These
charges may discharge into sensitive components or create electrostatic fields that may
induce charges on the human body. Although a person may be grounded, that does not mean
that insulative clothing fabrics can dissipate a charge to that person's skin and then to
ground. Clothing usually is electrically insulated or isolated from the body. Static
control garments are intended to minimize the effects of electrostatic fields or charges
that may be present on a person's clothing.
Workstations and Worksurfaces
Worksurfaces and workstations are important parts of an ESD-protective
program. Many ESDS devices and assemblies are handled, assembled, or repaired at
workstations.
An ESD-protective workstation refers to a single individual's work area
that is constructed and equipped with materials and equipment to limit damage to
ESD-sensitive items. It may be a stand-alone station in a stockroom, warehouse, or
assembly area, or in a field location such as a computer bay in commercial aircraft. A
workstation may also be located in a controlled area such as a cleanroom.
The workstation provides a means for connecting all worksurfaces,
fixtures, handling equipment, and grounding devices to a common point ground. In addition,
there may be provision for connecting additional personal grounding devices, equipment,
and accessories such as constant ground monitors and ionizers. The key ESD control
elements comprising most workstations are a static-dissipative work surface, a means of
grounding personnel (usually a wrist strap), a common grounding connection, and
appropriate signage and labeling.
Static-protective worksurfaces with a resistance to ground of 106 to
109 ohms provide a surface that is at the same electrical potential as other
ESD-protective items in the workstation. They also provide an electrical path to ground
for the controlled dissipation of any static potentials on materials that contact the
surface. The worksurface also helps define a specific work area in which ESD-sensitive
devices may be safely handled. The work- surface is connected to the common point ground.
Production Equipment and Production Aids
Although personnel-generated static is typically the primary ESD
culprit in many environments, automated manufacturing and test equipment can also pose an
ESD problem. For example, a device may become charged from sliding down the feeder. If the
device then contacts the insertion head or another conductive surface, a rapid discharge
occurs from the device to the metal object—a charged device model (CDM) event.
In addition, various production aids may also pose an ESD problem.
Production aids are those materials, tools, and fixtures that help to produce finished
products but do not become part of the finished product. Some examples are hand tools,
soldering irons, tapes, solvents, and so forth.
Grounding is the primary means of controlling static charge on many
production aids and equipment. The metal chassis or conductive enclosure of equipment that
uses utility power is required by the National Electrical Code to be connected to the
equipment ground (the green wire) in order to carry fault currents. This ground connection
will also function for ESD purposes. All electrical tools and equipment used to process
ESD-sensitive hardware require the three-prong grounded type ac plug. Hand tools that are
not electrically powered, i.e., pliers, wire cutters, and tweezers, are usually grounded
through the ESD worksurface and the (grounded) person using the conductive tools. Holding
fixtures should be made of conductive or static-dissipative materials when possible. If a
conductive fixture is not sitting on an ESD worksurface or handled by a grounded person, a
separate ground wire may be required. For those items that are composed of insulative
materials, the use of ionization or application of topical antistats may be required to
control generation and accumulation of static charges.
Packaging and Materials Handling
Direct protection of ESDS devices from electrostatic discharge is
provided by packaging materials such as bags and corrugated, rigid, or semirigid packages.
The primary use of these items is to protect the product when it leaves the facility,
usually when shipped to a customer. In addition, materials-handling products such as tote
boxes and other containers primarily provide protection during inter- or intrafacility
transport.
The main ESD function of these packaging and materials-handling
products is to limit the possible impact of ESD from triboelectric charge generation,
direct discharge, and electrostatic fields. The initial consideration is to have
low-charging materials (antistatic) in contact with ESD-sensitive items. For example, the
antistatic property would control triboelectric charge resulting from sliding a board or
component into the package or container. A second requirement is that the material provide
protection from direct electrostatic discharge as well as shield from electrostatic
fields.
Many materials are available that provide all three benefits:
antistatic, discharge protection, and electric field suppression. The inside of these
packaging materials has an antistatic layer, but also has an outer layer with a surface
resistance generally in the dissipative range.
A material's antistatic properties are not necessarily predicted by its
resistance or resistivity. However, resistance or resistivity measurements help define the
material's ability to provide electrostatic shielding or charge dissipation. Electrostatic
shielding attenuates electrostatic fields on the surface of a package in order to prevent
a difference in electrical potential from existing inside the package. Electrostatic
shielding is provided by materials that have a surface resistance equal to or less than
1.0 x103 ohms when tested according to EOS/ESD-S11.11 or a volume resistivity
of equal to or less than 1.0 x 103 ohm/cm when tested according to the methods
of EIA 541.
Dissipative materials provide charge dissipation characteristics. These
materials have a surface resistance greater than 1.0 x 104 but less than or
equal to 1.0 x 1011 when tested according to EOS/ESD-S11.11 or a volume
resistivity greater than 1.0 x 105 ohm/cm but less than or equal to 1.0 x 1012
ohm/cm when tested according to the methods of EIA 541. Be aware that the very wide range
of resistance and resistivity results in a wide range of performance.
Grounding
In our discussion to this point, we have seen how important grounding
is to effective ESD control. Consequently, effective ESD grounds are of critical
importance in any operation, and ESD grounding should be clearly defined and regularly
evaluated.
ESD Association standard ANSI EOS/ESD 6.1—Grounding recommends a
two-step procedure for grounding ESD-protective equipment.
The first step is to ground all components of the work area
(worksurfaces, people, equipment, etc.) to the same electrical ground point called the
common point ground. This common point ground is defined as a "system or method for
connecting two or more grounding conductors to the same electrical potential."
This ESD common point ground should be properly identified. ESD
Association standard EOS/ESD S8.1-1993 recommends the use of a symbol to identify the
common point ground.
The second step is to connect the common point ground to the equipment
ground or the third (green) wire electrical ground connection. This is the preferred
ground connection because all electrical equipment at the workstation is already connected
to this ground. Connecting the ESD control materials or equipment to the equipment ground
brings all components of the workstation to the same electrical potential. If a soldering
iron used to repair an ESDS item were connected to the electrical ground and the surface
containing the ESDS item were connected to an auxiliary ground, a difference in electrical
potential could exist between the iron and the ESDS item. This difference in potential
could cause damage to the item.
Any auxiliary grounds (water pipe, building frame, ground stake)
present and used at the workstation must be bonded to the equipment ground to minimize
differences in potential between the two grounds.
Ionization
As we have seen, the primary method of static charge control is direct
connection to ground for conductors, static-dissipative materials, and personnel. However,
a complete static control program must also deal with isolated conductors that cannot be
grounded and insulating materials (e.g., most common plastics). Topical antistats are
often used to dissipate static charges from these items under some circumstances.
More frequently, however, air ionization can neutralize the static
charge on insulated and isolated objects by charging the molecules of the gases of the
surrounding air. Whatever static charge is present on objects in the work environment will
be neutralized by attracting opposite polarity charges from the air. Because it uses only
the air that is already present in the work environment, air ionization may be employed
even in cleanrooms where chemical sprays and some static-dissipative materials are not
usable.
Air ionization is not a replacement for grounding methods. It is one
component of a complete static control program. Ionizers are used when it is not possible
to properly ground everything and as backup to other static control methods. In
cleanrooms, air ionization may be one of the few methods of static control available.
Cleanroom Requirements
While the basic methods of static control discussed here are applicable
in most environments, there are characteristics of the semiconductor manufacturing process
that require special considerations.
Many objects integral to the semiconductor manufacturing process
(quartz, glass, plastic, and ceramic) are inherently charge generating. Because these
materials are insulators, this charge cannot be removed easily by grounding. Many static
control materials contain carbon particles or surfactant additives that sometimes restrict
their use in cleanrooms. The need for personnel mobility and the use of cleanroom garments
often make the use of wrist straps difficult. In these circumstances, ionization and
flooring and footwear systems become key weapons against static charge.
Identification
A final element in our static control program is the use of appropriate
symbols to identify static-sensitive devices and assemblies, as well as products intended
to control ESD. The traditional symbols used to identify ESDS parts or ESD control
materials have been replaced with newer, more appropriate symbols. ESD Association
standard ANSI ESD S8.1-1993—ESD Awareness Symbols provides two symbols for ESD
identification.
The ESD Susceptibility Symbol consists of a triangle, a reaching hand,
and a slash through the reaching hand. The triangle means "caution" and the
slash through the reaching hand means "Don't touch." Because of its broad usage,
the hand in the triangle has become associated with ESD, and the symbol literally
translates to "ESD-sensitive stuff, don't touch."
The ESD Susceptibility Symbol is applied directly to integrated
circuits, boards, and assemblies that are static-sensitive. It indicates that handling or
use of this item may result in damage from ESD if proper precautions are not taken. If
desired, the sensitivity level of the item may be added to the label.
The ESD Protective Symbol consists of the reaching hand in the
triangle. An arc around the triangle replaces the slash. This "umbrella" means
protection. The symbol indicates ESD-protective material. It is applied to mats, chairs,
wrist straps, garments, packaging, and other items that provide ESD protection. It may
also be used on equipment such as hand tools, conveyor belts, or automated handlers that
are especially designed or modified to provide ESD control.
Neither symbol is applied on ESD test equipment, footwear checkers,
wrist strap testers, resistance or resistivity meters, or similar items that are used for
ESD purposes, but which do not provide actual protection.
Effective static control programs require a variety of procedures and
materials. In this column, we have provided a brief overview of the most commonly used
elements of a program. Additional in-depth discussion of individual materials and
procedures can be found in publications such as the ESD Handbook published by the ESD
Association.
ESD-S1.1—Evaluation, Acceptance, and Functional Testing of Wrist
Straps
ESD STM 4.1 (Revised)—ESD Protective Work Surfaces—Resistive
Characterization
ANSI ESD S11.1—Surface Resistance Measurement of Static Dissipative
Planar Materials
ANSI ESD S11.31—Evaluating the Performance of Electrostatic Discharge
Shielding Bags
Quest Technology (HK) Ltd.
C/o SIMCO (HK) Ltd.