Quest Technology (H.K.) Ltd.

AiM-100: Surface Molecular Contamination Monitor
Real-time detection of trace depositions of surface molecular contamintion (SMC) on SiO2 or metallic surfaces. AiM's surface acoustic wave technology quantifies the deposition of a range of SMC contaminants in ultra-clean environments.

BENEFITS: Real-time monitoring of damaging SMC depositions Silicon dioxide sensor chip emulates silicon wafer surface Onboard storage of up to 7,200 sample data sets (5 days at sample period of once per minute) Easy to remove and send sensor chip for TOF/SIMS lab testing to identify contaminating species Use in conjunction with traditional test wafer analysis Support services available for analysis of contaminants Low capital investment Provides data on deposition mass, deposition rate, ambient temperature and relative humidity Use as either a stand-alone monitor, or as part of an integrated facility monitoring system RS-232 communications allows easy integration into Facility Net or other existing data management systems Sub-monolayer sensitivity allows AMC problems to be detected before they significantly damage product and process surfaces Real-time data display and tracking via powerful facility monitoring software (Facility Net) Simple portable operation via HyperTerminal Battery supports stand-alone use

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FEATURES: Monitors SMC deposition on SiO2 or metallic surfaces Detects mass depositions with a sensitivity of 0.02 ng/cm2/Hz Program to sample every 1 to 60 minutes RH compensation algorithm Small footprint, easy to mount Battery operated or mains powered Data download to Excel via HyperTerminal software Real-time data collection, monitoring, and alarms via Facility Net software	APPLICATIONS: Protect valuable optics against organic hazes in DUV lithography or aerospace applications Monitor copper and other metallic surfaces for corrosion Detect breakthrough of chemical filters Detect cross-contamination of FOUPs or deposition of TDH on stored wafers General surface molecular contamination (SMC) monitoring